The technology of manufacturing nanostructured metal-dielectric substrates (templates) that can be used in the production of integrated microcircuits

Short summary A University (Ukraine) offers technology for creating planar nanostructured templates that help form structures with a given type of arrangement of elements and can be used in nanoelectronics, optoelectronics, and alternative energy sources. Environmentally friendly technology allows the creation of templates with characteristics adapted to needs. Looking for investors and partners to jointly research the template characteristics and organize their production.

Full description The importance of creating materials on a nanoscale, in particular the organization of the processes of ordering nanoobjects using templates, is one of the main directions of the development of physical materials science and modern nanotechnologies. A template organizes the physical and chemical processes of structuring nano-objects on their surface in space and time due to near-field interaction. Template tools of molecular and integrated electronics direct the processes of self-organization of a substance, and cause its structuring after applying a template to the surface, for example, by sputtering in a vacuum or the atmosphere of appropriately selected gases. This allows the formation of objects with a certain molecular organization and topology, connected by a nano-wire. The University team has many years of experience in the research field of nano- and molecular electronics technologies and the creation of functional elements. The university, in collaboration with several Ukrainian research institutes, has experience in developing promising ways of creating nanostructured planar templates that use spatial modulation of the electrical relief of the film surface by optical holography methods using light field exposure. The technology of creating a two-dimensional superlattice of ordered nanoclusters on the surface of the photoconductive layer is proposed, in which spatially periodic or quasi-periodic structures of light fields are created with the help of multibeam interference, a hologram is registered, it is converted into the corresponding structural distribution of matter, and the hologram is registered on the surface of an electrically charged photoconductive layer, formed a spatially modulated electric charge is placed on the surface of the photoconductive layer, and ionized nanoparticles of the superlattice material are applied to the energetically modulated surface. The characteristic spatial dimensions of the formed structures belong to the submicron range, the elements of the noble metal template have a height of up to 50 nm and a spatial period of 100-150 nm. The technology is illustrated by the example of creating a gold template, see Fig. 1-Fig. 3. In places where the film is irradiated, it is possible to form not only a relief (relief template) but also a captured charge (electret template) according to the scheme of Fig. 2. The density of the localized electric charge turns out to be modulated in proportion to the intensity of the light field in the exposing hologram. On Fig. 2.: a – hologram exposure of a charged photoconductor film, b- formation of trapped charges during exposure, c- adsorption of gold in the bulk of the electric field and formation of gold clusters: 1- charge on the surface of the film, 2- photoconductor film, 3- conductive substrate, 4- trapped electric charge, spatially modulated by illumination, 5- adsorbed nanoclusters. The results of surface morphometry are illustrated in Fig. 3. The practical significance of the proposed technology lies in the creation of an original technique for obtaining an electret template with high spatial resolution, which is a composite system consisting of thin films of metal and amorphous carbon in the crystalline phase. These objects, due to their unique properties that can be adjusted by the spatial topology of the optical field, are promising materials for the production of sensors, optoelectronics, computing devices, supersensitive devices based on metal-dielectric layers of resonant photonic crystals for spectroscopy in the visible range, as well as the creation of low-dimensional systems. The university is looking for partners for conducting further research on the ranges of changes in the characteristics of planar nanostructured templates via a research and development agreement and investors to organize the introduction of the technology into production via an investment agreement.

Advantages and innovations 1. The topology of the location of charges near the surface of the template is directly used to organize the substance on its surface without the formation of masks, it does not require the use of aggressive environments, wet processing and subsequent drying, during which the template can be deformed. 2. The technology allows you to form an organized structure that can be used in the production of microcircuits. 2. The relief and field topologies of the template are determined by the global field and the creation of an electric charge in the volume of the photosensitive semiconductor. 3. The limiting spatial ability of the template to form organized structures is determined by the volume charge

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